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| How many methods do FABs use to keep unwanted impurity levels low? |
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| What particle density does the FAB need to stay under? |
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| What do defects cause as chip size increases? |
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| yields to reduce exponentially |
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| what percent of modern yield loss is due to particles on the wafer? |
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| What type of filters are used in cleanrooms? |
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| Semiconductor particles include |
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-particles
-photoresist
-trace elements |
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| What are photoresists removed with? |
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| What does heavy metal gettering rely on? |
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-metals diffusing rapidly in silicon
-metals segregating to 'trap' sites |
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| What can trap sites be created using? |
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| What does gettering consist of? |
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-making metal atoms mobile
-migration of these metals to trapping sites
-trapping of atoms |
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| What atoms does gettering contain? |
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